VSEA - Service - Uptime Plus Program

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Uptime Plus Program

Ready to Install
Varian Semiconductor is the expert in refurbishment of sensitive vacuum assemblies. We offer finished assemblies in a “Ready to Install” state. Parts are refurbished, tested, baked-out pumped down and stored in specially designed vacuum shipping vessels. These are delivered in smart storage containers that enable qualified parts to quickly and easily be installed in production cleanroom environments.

Designed to Increase Uptime
By shipping fully vacuum-ready, assemblies can be installed with minimal downtime during vacuum recovery. For maximum effectiveness, assemblies can be shared with multiple tools to reduce costs and storage space.

Production Proven
Our replacement parts specifications, assembly procedures, and test methods have been validated in production systems to assure compatibility and optimal performance. Only Varian Semiconductor can assure that replacement parts meet our design, quality and materials specifications to assure the highest tool performance.


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