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VIISta SuperScan provides a method of using VIISta ion implanters to compensate for non-uniformity of device electrical characteristics resulting from other semiconductor process steps. SuperScan improves device performance and yield.
Benefits
Corrects Vt non-uniformity
Compensates for gate-length critical dimension (CD) variations
Designed for production and development applications
Available as an option on new VIISta ion implanters and as an upgrade for installed systems
Features
User defined, recipe-based dose control
Recipe inputs
Number of zones
Dose in each zone
Zone radius
Prerequisites
VIISta roplat and universal endstation
Version 6.90 sw and above
Compatible VSEA dose controller
Available VIISta Systems
Medium Current: VIISta 810HP, 810EHP, 810XE, 810XEr, 810XP and 900XP models
High Current: VIISta 80HP, HC and HCP models
Product Families
VIISta Platform
Overview
High Current
Overview
VIISta HCS
VIISta HCP
VIISta HC
Medium Current
Overview
VIISta 810XP
VIISta 810XEr
VIISta 900XP
High Energy
Overview
VIISta 3000XP
Upgrade Products
VIISta SuperScan
VIISta vMASK
Related Information
Collateral
VIISta SuperScan Data Sheet
(PDF)
Animation
Related Links
Service and Support
Spares and Consumables
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