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| VIISta® High Current |
| Varian Semiconductor is the leader in high current ion implanters, shipping more single-wafer high current systems than all other competitors combined. |
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The VIISta High Current series feature:
- Dual-magnet, ribbon beam architecture with a demonstrated 2X improvement in particle performance vs. other companies’ high current tools
- The patented Closed-Loop Varian Positioning System (VPStm ) delivers accurate and repeatable incident beam angle control
Our high current implanters offer:
- Highest productivity on a production-proven single-wafer architecture and highest overall productivity of any ion implanter in the industry
- Best particle performance
- Production-proven results from leading-edge memory, logic, and foundry manufacturers worldwide
Our high current implanters are based on a common platform, providing customers with flexibility in managing overall bay productivity, resulting in:
- Decreased time to first silicon
- Greater productivity across all applications
- Highest industry throughput
- Precise beam steering and tilt accuracy
- Flexible product mix changes
- Cost-effective training
- Increased return on investment
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